MACHAFILM - Thin Film Deposition Laboratory
Thin film deposition bench
Context
- Two ALD reactors:
- Research Scale: small sample, test new chemistries and thin film deposition processes
- Developments scale: ALD on large objects.
- Future HIPIMS (High Impulse Magnetron Sputtering) deposition system on samples and large objects.
- Research topics: Corrosion, Supraconductors (cavité, QuBits), multipacting (coupleurs, cavité...), filtration.
- Materials: nitrides, oxides, some metals.
Research Scale Technical means
- Chamber reactor ØxL: 5x50 cm
- Temparature: 30-450°C,
- 7 precursor lines :
- 3 solids, 2 liquids, 2 gases
- Chamber adaptation possible (cavité, QPR),
- In situ: RGA, QCM.
Development Scale Technical means
- High vacuum oven ØxL: 50x110 cm,
- Temperature: 30-450°C,
- 8 precursor lines :
- 4 solids, 2 liquids, 2 gases
- Chamber adaptation possible (cavité, QPR),
- In situ: RGA.
Other
- Glove box under N2,
- Sorbonne,
- 4 points measurement at RT,
- Optical microscope,
- 3 zones tubular oven under gas (Ar, N2, O2, N2-H2) up to 1100°C.
Collaborations
Supraconducting thin films for cavities:
- Collaborations European network: ARIES, IFAST: CEA, CERN, HZB, STFC, INFN.
- Collaboration USA: Jlab.
- Collaboration France:
- Région: Sésame AXESRF (CNRS/IJCLab-CEA)
- P2IO: CATTISA (CNRS/IJCLab-CEA)
Multipacting – tuning surface SEY:
- Collaboration ONERA.
Anticorrosions and diffusion barriers:
- Collaboration CEA/DES (anticorrosion filters)
- Collaboration CEA/IRAMIS (nanotube growth)
This plateform is proposed to Transnational access in the framework of the EURO-LABS – EUROpean Laboratories for Accelerator Based Science project. To know how to apply, visit the EURO-LABS website.
It is also available for external users thanks to the AMICI collaboration.
Contact:
#5095 - Last update : 02/16 2023
